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Liquid Lens
Microfabrication of liquid lens with aspheric polymer windows
FunderFrench National Research Agency (ANR)
Funder Contribution €613,891.00
DurationFrom 01 Mar 2008
Project codeANR-07-MAPR-0025
Identifiers
Description
The goal of the program is to establish the technology bricks for the second generation of liquid lenses based on electrowetting. These lenses will be based on silicon wet-etch cavities and aspheric polymer windows. These lenses will be a key component of future miniature CMOS imagers 3-5Mpixels for mobile phones or smartphones. Varioptic has developed a first generation of liquid lenses based on electrowetting, where the interface between two non miscible liquids moves by application of a 60V ac voltage. The liquid liquid interface is sliding in a conical cavity which surface is critical for the optical quality of the lens. Nevertheless the development of a second generation of liquid lenses needs to get a better surface state, by using anisotropic etching of silicon. This will allow to increase the optical quality of the liquid lens by a factor 3, and to decrease the voltage (20V is the target). In order to be integrated in small optical modules, the liquid lens has to integrate also aspheric curved windows, made by precision plastic moulding. Varioptic has made a huge effort in the past and demonstrated that polycarbonate is too permeable to the liquids. The research program includes thus a significant effort to produce high precision windows in polyolefin (target 90nm precision of the moulded windows surface), and to develop barrier layers at the inner surface of those windows in order to keep liquids tight inside the cell. The barrier layers, based on PECVD SiOC, have to be different on top and bottom windows and their surface polarity needs to be precisely controlled. One of the layer should be hydrophilic with a low permeation coefficient for water, the other should be hydrophobic with a low permeation coefficient for oil. The program includes interim deliverables using the research bricks and will be followed by an overall assembly into a demonstrator lens.
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The goal of the program is to establish the technology bricks for the second generation of liquid lenses based on electrowetting. These lenses will be based on silicon wet-etch cavities and aspheric polymer windows. These lenses will be a key component of future miniature CMOS imagers 3-5Mpixels for mobile phones or smartphones. Varioptic has developed a first generation of liquid lenses based on electrowetting, where the interface between two non miscible liquids moves by application of a 60V ac voltage. The liquid liquid interface is sliding in a conical cavity which surface is critical for the optical quality of the lens. Nevertheless the development of a second generation of liquid lenses needs to get a better surface state, by using anisotropic etching of silicon. This will allow to increase the optical quality of the liquid lens by a factor 3, and to decrease the voltage (20V is the target). In order to be integrated in small optical modules, the liquid lens has to integrate also aspheric curved windows, made by precision plastic moulding. Varioptic has made a huge effort in the past and demonstrated that polycarbonate is too permeable to the liquids. The research program includes thus a significant effort to produce high precision windows in polyolefin (target 90nm precision of the moulded windows surface), and to develop barrier layers at the inner surface of those windows in order to keep liquids tight inside the cell. The barrier layers, based on PECVD SiOC, have to be different on top and bottom windows and their surface polarity needs to be precisely controlled. One of the layer should be hydrophilic with a low permeation coefficient for water, the other should be hydrophobic with a low permeation coefficient for oil. The program includes interim deliverables using the research bricks and will be followed by an overall assembly into a demonstrator lens.
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