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TIPTOP_1
Development, characterization and batch fabrication of atomic force microscopy cantilevers for tip-enhanced Raman spectroscopy applications
FunderFrench National Research Agency (ANR)
Funder Contribution €442,409.00
DurationFrom 03 Oct 2016
Project codeANR-16-CE09-0029
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Description
TITOP_1 is an industrial collaborative project aiming to overcome the current technological blocking point in Tip Enhanced Raman Spectroscopy (TERS), namely the availability of tips for Atomic Force Microscopy (AFM) in TERS applications, with high performance, reliability, reproducibility and easy access. The TIPTOP_1 project is based on preliminary results showing an innovative geometry, compatible with micro-electronics manufacturing processes. The scientific and industrial objectives are : - Micro / nano fabrication of such AFM-TERS probes, with the final goal of manufacturing in series - Demonstrating the use of those probes in reference systems (some of them not accessible to today’s probes) - Applying those probes for nanoelectronics, especially to measure localized strain in semiconductor structures (Si transistor)
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TITOP_1 is an industrial collaborative project aiming to overcome the current technological blocking point in Tip Enhanced Raman Spectroscopy (TERS), namely the availability of tips for Atomic Force Microscopy (AFM) in TERS applications, with high performance, reliability, reproducibility and easy access. The TIPTOP_1 project is based on preliminary results showing an innovative geometry, compatible with micro-electronics manufacturing processes. The scientific and industrial objectives are : - Micro / nano fabrication of such AFM-TERS probes, with the final goal of manufacturing in series - Demonstrating the use of those probes in reference systems (some of them not accessible to today’s probes) - Applying those probes for nanoelectronics, especially to measure localized strain in semiconductor structures (Si transistor)
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