SiCNeural

Silicon carbide (SiC) is proposed as material to develop single material BMIs addressing the issue of their low lifetime. SiC is a biocompatible semiconductor, stiff material and therefore highly flexible for small thickness (<15 µm)). Moreover, small electrode thickness results in minimal foreign body response. The three SiC crystal phases (amorphous, poly- and single-crystalline) will be investigated as active electrode, insulating and support material. The proof-of-concept will be performed with the elaboration and in-vivo evaluation of an all-SiC very thin (<15µm) µECoG exhibiting long-term stability (several months), low impedance (<30kO at 1kHz), noise level (<3µV RMS for 1-5000Hz) and signal quality (surface multiunit/unit activity/LFPs detection). A nanowire array formation in electrode area will be employed to increase the recorded signal. Amorphous SiC surface will be functionalized for minimum tissue inflammation purposes.