AMMicro

Current 2.5D microelectromechanical systems (MEMS) devices are disadvantaged by their distinctive unreliability. Lack of built-in damage sensing, impact protection mechanisms and the absence of application-relevant reliability tests, collectively mask the true potential of MEMS devices. AMMicro will address these limitations by designing and developing the building blocks essential for robust next-generation 3D MEMS devices. This will be done using a novel combination of cutting edge electrodeposition technique and advanced reliability testing protocols. Localized electrodeposition in liquid (LEL) is an advanced micromanufacturing technology, capable of printing 3D metal micro-/nano-architectures. With recent developments in advanced reliability testing using micro/nanomechanical testing (MNT) platforms, application-relevant high dynamic conditions are possible, yet remain under-exploited. AMMicro will break new ground by harnessing the combined potential of LEL and MNT. Multimetal microlattices will be fabricated with optimized position-specific chemical compositions to maximize specific impact energy absorption. Multiphase microlattices fabricated with dyed fluid encapsulations and pressure-release valves will enable novel self-damage sensing and impact-protection mechanisms. Full-metal 3D MEMS based load sensors will be fabricated and used for tensile testing of LEL printed nanowires. The enhanced reliability of these microarchitectures will be validated using application-relevant advanced mechanical testing. AMMicro is a highly interdisciplinary project at the boundary of materials science, mechanical, electrical and manufacturing engineering. For the material science community, it will pave the way for breakthroughs in critical applications including catalysis, phononics, photonics, etc. Beyond materials science, it has the transformative potential to revolutionize several fields including drug delivery, microscale temperature sensors, etc.