Reliable nExt GENERation Actuation sysTEms (REGENERATE)

Linear electromagnetic actuators are used in high-tech motion systems. They for example enable the positioning of wafers with nanometer precision in lithography machines. Increasing requirements on actuator acceleration and precision have led to higher mechanical, electromagnetic and thermal stresses and non-recoverable failures. Actuator reliability has therefore become a major concern, but failure mechanisms are currently poorly understood. In this multidisciplinary project we study the main failure mechanisms of actuators, using models ranging from the atomistic to the mechanical scale combined with experimental measurements. The outcomes are used to improve future linear actuator systems and reliability at partners ASML and Tecnotion.